bar
bar
bar
bar
H2 MFC M70.1
CV
l/m
Setpoint
l/m
N2 MFC M70.2
CV
l/m
Setpoint
l/m
Air MFC M70.3
CV
l/m
Setpoint
l/m
Setpoint
°C
Temperature
°C
Signal
%
Voltage 1
V
Voltage 2
V
Voltage 3
V
Voltage 4
V
Voltage 5
V
Voltage 6
V
Voltage 7
V
Voltage 8
V
Voltage 9
V
Voltage 10
V
Voltage 11
V
Voltage 12
V
Voltage 13
V
Voltage 14
V
Setpoint
°C
Temperature
°C
Signal
%
bar
bar
NaN
bar
°C
°C
Setpoint
°C
Temperature
°C
Signal
%
Input
°C
Output
°C
°C
°C
bar
bar
NaN
bar
°C
°C
DC Sink
Setpoint
A
Voltage
V
Current
A
Power
W
°C
%
°C